JPH0572054B2 - - Google Patents

Info

Publication number
JPH0572054B2
JPH0572054B2 JP58202204A JP20220483A JPH0572054B2 JP H0572054 B2 JPH0572054 B2 JP H0572054B2 JP 58202204 A JP58202204 A JP 58202204A JP 20220483 A JP20220483 A JP 20220483A JP H0572054 B2 JPH0572054 B2 JP H0572054B2
Authority
JP
Japan
Prior art keywords
secondary electrons
sample
objective lens
electrode
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58202204A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6095843A (ja
Inventor
Tadashi Ootaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58202204A priority Critical patent/JPS6095843A/ja
Publication of JPS6095843A publication Critical patent/JPS6095843A/ja
Publication of JPH0572054B2 publication Critical patent/JPH0572054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58202204A 1983-10-28 1983-10-28 電子ビ−ム装置 Granted JPS6095843A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58202204A JPS6095843A (ja) 1983-10-28 1983-10-28 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58202204A JPS6095843A (ja) 1983-10-28 1983-10-28 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS6095843A JPS6095843A (ja) 1985-05-29
JPH0572054B2 true JPH0572054B2 (en]) 1993-10-08

Family

ID=16453684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58202204A Granted JPS6095843A (ja) 1983-10-28 1983-10-28 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS6095843A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0949653B1 (en) * 1991-11-27 2010-02-17 Hitachi, Ltd. Electron beam apparatus
DE602007007468D1 (de) * 2007-07-27 2010-08-12 Integrated Circuit Testing Magnetische Linsenanordnung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6233246Y2 (en]) * 1980-06-27 1987-08-25
JPS58197644A (ja) * 1982-05-13 1983-11-17 Akashi Seisakusho Co Ltd 電子顕微鏡およびその類似装置

Also Published As

Publication number Publication date
JPS6095843A (ja) 1985-05-29

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